@conference{3305,
  author = {Damiano Nardi and Kathleen Hoogeboom-Pot and Jorge Charpak and Marie Tripp and S. King and E. Anderson and Margaret Murnane and Henry Kapteyn},
  title = {SPIE Proceedings Probing limits of acoustic nanometrology using coherent extreme ultraviolet light},
  year = {2013},
  journal = {unknown},
  month = {2013-01},
  publisher = {SPIE},
  address = {San Jose, California, USA},
  doi = {10.1117/12.2011194},
}