@article{2948,
  author = {T. Purdy and R. Peterson and P.-L. Yu and Cindy Regal},
  title = {Cavity optomechanics with Si3N4 membranes at cryogenic temperatures},
  year = {2012},
  journal = {New Journal of Physics},
  volume = {14},
  pages = {115021},
  month = {2012-11},
  url = {http://stacks.iop.org/1367-2630/14/i=11/a=115021?key=crossref.11356b3176442bddf1dcc4ae5ae5b3b0},
  doi = {10.1088/1367-2630/14/11/115021},
}