@article{29, author = {H.-C. Chuang and R. Jimenez-Martínez and Simon Braun and Dana Anderson and V. Bright}, title = {Tunable external cavity diode laser using a micromachined silicon flexure and a volume holographic reflection grating for applications in atomic optics}, year = {2008}, journal = {Journal of Micro/Nanolithography, MEMS and MOEMS}, volume = {7}, pages = {021010}, month = {2008-01}, issn = {15371646}, doi = {10.1117/1.2911630}, }