@article{27,
  keywords = {pfc},
  author = {H.-C. Chuang and Dana Anderson and V. Bright},
  title = {The fabrication of through-wafer interconnects in silicon substrates for ultra-high-vacuum atom-optics cells},
  year = {2008},
  journal = {Journal of Micromechanics and Microengineering},
  volume = {18},
  pages = {045003},
  month = {2008-04},
  issn = {0960-1317},
  doi = {10.1088/0960-1317/18/4/045003},
}