@article{13336,
  author = {Yuka Esashi and Nicholas Jenkins and Y. Shao and Justin Shaw and S. Park and Margaret Murnane and Henry Kapteyn and Michael Tanksalvala},
  title = {Tabletop Extreme Ultraviolet Reflectometer for Quantitative Nanoscale Reflectometry, Scatterometry, and Imaging},
  year = {2023},
  journal = {Review of Scientific Instruments (In Press)},
}