@article{13336, author = {Yuka Esashi and Nicholas Jenkins and Y. Shao and Justin Shaw and S. Park and Margaret Murnane and Henry Kapteyn and Michael Tanksalvala}, title = {Tabletop Extreme Ultraviolet Reflectometer for Quantitative Nanoscale Reflectometry, Scatterometry, and Imaging}, year = {2025}, journal = {In Press}, }